Title :
A multi-channel test system for calibration of MEMS barometric pressure sensors
Author :
Lou Wenzhong ; Ding Xuran ; Hong Rongsen
Author_Institution :
State Key Lab. of Mechatron. Eng. & Control, Beijing Inst. of Technol., Beijing, China
Abstract :
For the advantages of small volume, low power consumption and high accuracy, MEMS sensors have been widely used in many fields, especially for high altitude meteorology monitoring, where a radiosonde with MEMS barometric pressure sensors will be used to collect the data of barometric pressure. Therefore, the way to calibrate such MEMS sensors effectively is of a great value. This paper reported a method for calibration of multiple state of the art MEMS barometric pressure sensors simultaneously based on an innovative test system. With this system, at most eight sensors can be calibrated in a same time. A test for this system by utilizing BMP085 has been implemented, and the results showed that the system was reliable and effective.
Keywords :
atmospheric pressure; calibration; microsensors; pressure sensors; test equipment; virtual instrumentation; BMP085; MEMS barometric pressure sensor calibration; high altitude meteorology monitoring; multichannel test system; radiosonde; small volume low power consumption; software Labview; Accuracy; Calibration; Hysteresis; Linearity; Micromechanical devices; Sensor systems; Radiosondes; calibration of MEMS sensors; multi-channel; test system;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559782
