Title :
Analysis of electromechanical interface model for liquid floated micro-gyroscope
Author :
Mingyuan Ren ; Xiaowei Liu ; Wen Zuo ; Zhigang Mao
Author_Institution :
MEMS Center, Harbin Inst. of Technol., Harbin, China
Abstract :
This paper presents an electromechancial interface model of liquid floated micro-gyroscope, which can analyze sensing capacitors and resistance of gyroscope. The impacts of them are analyzed and simulated with the simulation software of circuit. The analytic results indicate that the reasonable interface circuit can substantially remove the impacts of these parasitic capacitances, increase the signal noise ratio. To ensure the high resolution, the model of liquid floated micro-gyroscope with ANSOFT conducted. The results show the transfer characteristics of the sensor and nonlinear error of transfer characteristics.
Keywords :
gyroscopes; microsensors; ANSOFT; capacitors; electromechanical interface model; gyroscope resistance; high resolution; liquid floated microgyroscope; nonlinear error; parasitic capacitances; reasonable interface circuit; sensors; signal noise ratio; transfer characteristics; Capacitors; Gyroscopes; Integrated circuit modeling; Liquids; Magnetic liquids; Mathematical model; Rotors; electromechanical interface model; gyroscopet; liquid floated;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559846
