Title :
Reliability evaluation of micromirror of double S-shaped unimorph piezoelectric actuator with probabilistic approach
Author :
Wenjing Liu ; Yongming Tang ; Baoping Wang
Author_Institution :
Sch. of Electron. Sci. & Eng., Southeast Univ., Nanjing, China
Abstract :
This paper presents the long time reliability evaluation of a micromirror with double S-shaped unimorph piezoelectric (dSUP) actuator design using a probabilistic approach. The lifetime (number of cycles to failure) of the piezoelectric actuator, electrical strength, and electrical load are considered as the random variables; and their probability distributions are discussed. The interference model of electrical load and electrical strength is used to evaluate the reliability of dSUP actuators. By this approach, the relationship between the reliability and the lifetime of the dSUP actuator has been deduced.
Keywords :
light interference; micromirrors; optical design techniques; piezoelectric actuators; probability; random processes; reliability; dSUP actuators; double S-shaped unimorph piezoelectric actuator; electrical load; electrical strength; failure; interference model; lifetime; long time reliability evaluation; micromirror; probabilistic method; probability distributions; random variables; Micromirrors; Piezoelectric actuators; Probabilistic logic; Probability density function; Probability distribution; Reliability; Micromirror; Piezoelectric Actuator; Probabilistic Approach; Reliability;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559849
