Title :
Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs
Author :
Qiao Chen ; Hao Zhang ; Xiaoyang Zhang ; Dacheng Xu ; Huikai Xie
Author_Institution :
Wuxi WiO Technol. Co. Ltd., Wuxi, China
Abstract :
MEMS devices based on bimorphs are affected by several effects including creep, stress, and fracture in bimorph structures. In this paper, we present the reliability study of an S-shaped bimorph MEMS mirror. The following tests are performed: 100 million cycle scanning, vibration, and isothermal holding. Only 0.4% scan angle change was observed after experiencing a 6-axis, 20g vibration. A maximum 0.7% change was measured after the MEMS mirror gone through an isothermal holding for 10 hours at 150°C. After a 100 million cycles of scanning, the maximum drift was less than 0.01°.
Keywords :
aluminium; micro-optomechanical devices; micromechanical devices; micromirrors; reliability; silicon compounds; vibrations; 2D MEMS mirrors; Al-SiO2; MEMS devices; S-shaped aluminium-silica bimorphs; S-shaped bimorph MEMS mirror; bimorph structure; creep; cycle scanning; fracture; isothermal holding; reliability study; scan angle change; scanning million cycles; stress; temperature 150 degC; time 10 hour; vibration; Actuators; Isothermal processes; Micromechanical devices; Micromirrors; Reliability; Vibrations; MEMS mirror; bimorph strucure; reliability; repeatability; thermal actuator;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559850
