A tunable metamaterial absorber employing MEMS actuators in THz regime

Author

Tianyang Yang ; Xiuhan Li ; Wangqiang Zhu

Author_Institution

Inst. of Electron. & Inf. & Eng., Beijing Jiaotong Univ., Beijing, China

fYear

2013

fDate

7-10 April 2013

Firstpage

829

Lastpage

832

Abstract

As Micro-electromechanical Systems (MEMS) fabrication and actuation methods are very suitable to realize the tunability of metamaterials in terahertz regime, a kind of tunable metamaterial absorber based on MEMS techniques is proposed in this paper. Firstly, an improved electric ring resonator (ERR) absorber model is put forward and the geometrical parameters are optimized to improve the absorption characteristics. Then the feasible fabrication method of the movable ERR structure is discussed. By employing MEMS actuators the frequency of absorption peak is tunable. A simulated full width at half maximum (FWHM) absorbance of 4% is achieved and the simulation results demonstrate a peak absorbance greater than 98% at the whole tunable frequency range from 1.08 THz to 1.20THz.

Keywords

electromagnetic wave absorption; microactuators; microfabrication; resonators; terahertz metamaterials; FWHM absorbance; MEMS actuation method; MEMS actuators; MEMS fabrication method; MEMS technique; THz regime; absorption characteristics; absorption peak frequency; frequency 1.08 THz to 1.20 THz; full width-half maximum absorbance; geometrical parameters; improved ERR absorber model; improved electric ring resonator absorber model; metamaterial tunability; microelectromechanical systems; terahertz regime; tunable metamaterial absorber; Actuators; Magnetic materials; Metamaterials; Micromechanical devices; Optical ring resonators; Resonant frequency; Wires; MEMS; Metamaterial absorber; terahertz; tunability;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on

Conference_Location

Suzhou

Electronic_ISBN

978-1-4673-6351-8

Type

conf

DOI

10.1109/NEMS.2013.6559853

Filename

6559853