A triaxial monolithic silicon accelerometer with improved temperature characteristics

Author

Peng Chen ; Dingbang Xiao ; Zhihua Chen ; Ye Yuan ; Xinghua Wang ; Songqi Hu ; Yulie Wu

Author_Institution

Coll. of Mechatron. & Autom., Nat. Univ. of Defense Technol., Changsha, China

fYear

2013

fDate

7-10 April 2013

Firstpage

1006

Lastpage

1009

Abstract

A novel triaxial monolithic silicon accelerometer with improved temperature characteristics is presented in this paper. Two methods were put forward to improve the temperature characteristics of the accelerometer. One is the optimization of the anchor configuration to decrease the temperature drift, and the other is the integration of an on-chip matching capacitor to counteract capacitance variation. A facile micromachined process flow was investigated, and the differential capacitance readout circuit was setup. The FEM simulations and experimental results prove that the methods are available and effective.

Keywords

accelerometers; capacitors; elemental semiconductors; finite element analysis; flow measurement; integration; micromachining; optimisation; silicon; FEM simulations; Si; anchor configuration; capacitance variation; differential capacitance readout circuit; facile micromachined process flow; integration; on-chip matching capacitor; optimization; temperature characteristics; temperature drift; triaxial monolithic silicon accelerometer; Acceleration; Accelerometers; Capacitance; Capacitors; Silicon; Temperature; Temperature sensors; anchor configuration; on-chip matching capacitor; temperature characteristics; triaxial accelerometer;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on

Conference_Location

Suzhou

Electronic_ISBN

978-1-4673-6351-8

Type

conf

DOI

10.1109/NEMS.2013.6559892

Filename

6559892