Close-loop self-compensation of the coupling error for silicon micromachined gyroscope

This paper presents the detailed analysis and preliminary design and experiment for close-loop self-compensation of the coupling error for silicon micromachined gyroscope. A closed-loop feedback control technology is adopted, which uses electrostatic force to counteract the change of coupling stiffness. The electrostatic force is generated by the detection variation of coupling error. Comparing with the open-loop detection, the experimental results indicated evidently that the proposed method can effectively decrease the value of the coupling error, increase its stability by 38 times, while the scale factor of the microgyroscope remains unchanged.