Title :
Soft magnetic properties of Ni81Fe19 film with different substrates used for micro-fluxgate
Author :
Yang Shanglin ; Liu Shibin ; Guo Bo ; Feng Wenguang ; Hou Xiaowei
Abstract :
The soft magnetic properties of Ni81Fe19 films respectively with Ti, Ta and Cr substrates used for micro-fluxgate have been studied in this paper. The films were characterized using transmission electron microscope (TEM), X-ray diffraction (XRD) and vibrating sample magnetometer (VSM). The testing results showed that Ta substrate film, due to its ladder rising hysteresis loop, is more appropriate for fluxgate core in these four kinds of Ni81Fe19 films, film with no substrate and film with Ti substrate take the second place and the Cr substrate film would not be suitable as fluxgate core because of its bad soft magnetic properties.
Keywords :
X-ray diffraction; iron alloys; magnetic hysteresis; magnetic thin films; metallic thin films; nickel alloys; soft magnetic materials; transmission electron microscopy; Cr; Cr substrate; Ni81Fe19; Ni81Fe19 film; TEM; Ta; Ta substrate; Ti; Ti substrate; VSM; X-ray diffraction; XRD; ladder rising hysteresis loop; microfluxgate core; soft magnetic properties; testing results; transmission electron microscopy; vibrating sample magnetometer; Crystals; Magnetic cores; Magnetic films; Magnetic hysteresis; Magnetic properties; Substrates; NiFe films; fluxgate; soft magnetic properties; substrate layer;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559897
