An optimized geometry model for the micro-machined liquid-suspended rotor gyroscope

The levitation of the rotor eliminates mechanical friction resulting in high sensitivity for micro-gyroscope, Theoretically. However, the rotor stability is difficult to control due to the rotor´s small size. Its performance can not rival vibratory gyroscope at present. In this paper a novel micromachined liquid-suspended rotor micro-gyroscope is proposed, whose stability is improved by liquid suspension. The magnetic field mode of micro-gyroscope is established to analyze the distribution of magnetic field and calculate the driving torque of the rotor. The structure of driving stator is optimized. The flow field model is established to optimize the rotor radius. Using optimized geometry model, the maximum rotational speed of the rotor is 23920rpm.