Title :
Development of flexible neural probes using SU-8/parylene
Author :
Zhuolin Xiang ; Hao Wang ; Songsong Zhang ; Shih-Cheng Yen ; Minkyu Je ; Wei Mong Tsang ; Yong-Ping Xu ; Thakor, Nitish V. ; Dim-Lee Kwong ; Chengkuo Lee
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
A new process for making SU-8 neural probe with fluidic channels and gold electrodes based on multilayered thin parylene and SU-8 is presented here. This approach can realize a thin 15 μm gap between electrode surface and neural cells. The thin gap will help to enhance the neural signal acquisition. Fluidic testing and mechanical testing are conducted to ensure the device reliability.
Keywords :
biomechanics; biomedical electrodes; gold; mechanical testing; medical signal detection; medical signal processing; neurophysiology; polymers; reliability; Au; SU-8 neural probe; device reliability; electrode surface; flexible neural probes; fluidic channels; fluidic testing; gold electrodes; mechanical testing; multilayered thin SU-8-parylene; neural cells; neural signal acquisition; size 15 mum; Electrodes; Etching; Fabrication; Force; Polymers; Probes; Testing; Neural probe; SU-8; electrode; parylene;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559908
