Title :
Ice Fishing Micro channels with sub-micron pores
Author :
Kim, J.Y.-H. ; Yang Liu ; Scianmarello, N. ; Satsanarukkit, P. ; Yu-chong Tai
Author_Institution :
DMC R&D Center, Samsung Elec., Suwon, South Korea
Abstract :
We report here a micro fluidic device with a controlled opening, which is used for accessing the fluid inside the micro channel from outside. The control of the reduced diameter of the opening pore is achieved by depositing a controlled Parylene layer on a starting lager opening hole. By changing the Parylene type and thickness, we can control the pore size and surface hydrophobicity. Due to the Laplace-Young´s pressure induced by the surface tension of the liquid in the vicinity of the pore, the internal fluid can be pressurized without leaking through the pore.
Keywords :
cantilevers; flow control; microchannel flow; size control; surface tension; Laplace-Young pressure; controlled parylene layer; ice fishing microchannels; internal fluid; microfluidic device; opening pore; pore size; submicron pores; surface hydrophobicity; surface tension; Adhesives; Etching; Ice; Liquids; Plasmas; Silicon; Laplace-Young´s Pressure; Micro-channel; Parylene;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559909