• DocumentCode
    619119
  • Title

    Ice Fishing Micro channels with sub-micron pores

  • Author

    Kim, J.Y.-H. ; Yang Liu ; Scianmarello, N. ; Satsanarukkit, P. ; Yu-chong Tai

  • Author_Institution
    DMC R&D Center, Samsung Elec., Suwon, South Korea
  • fYear
    2013
  • fDate
    7-10 April 2013
  • Firstpage
    1080
  • Lastpage
    1083
  • Abstract
    We report here a micro fluidic device with a controlled opening, which is used for accessing the fluid inside the micro channel from outside. The control of the reduced diameter of the opening pore is achieved by depositing a controlled Parylene layer on a starting lager opening hole. By changing the Parylene type and thickness, we can control the pore size and surface hydrophobicity. Due to the Laplace-Young´s pressure induced by the surface tension of the liquid in the vicinity of the pore, the internal fluid can be pressurized without leaking through the pore.
  • Keywords
    cantilevers; flow control; microchannel flow; size control; surface tension; Laplace-Young pressure; controlled parylene layer; ice fishing microchannels; internal fluid; microfluidic device; opening pore; pore size; submicron pores; surface hydrophobicity; surface tension; Adhesives; Etching; Ice; Liquids; Plasmas; Silicon; Laplace-Young´s Pressure; Micro-channel; Parylene;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
  • Conference_Location
    Suzhou
  • Electronic_ISBN
    978-1-4673-6351-8
  • Type

    conf

  • DOI
    10.1109/NEMS.2013.6559909
  • Filename
    6559909