DocumentCode :
620667
Title :
Optimized gradient-free PZT thin films for micro-actuators
Author :
Abergel, J. ; Allain, M. ; Michaud, H. ; Cueff, M. ; Ricart, T. ; Dieppedale, C. ; Le Rhun, G. ; Faralli, D. ; Fanget, S. ; Defay, E.
Author_Institution :
CEA-LETI, Minatec, Grenoble, France
fYear :
2012
fDate :
7-10 Oct. 2012
Firstpage :
972
Lastpage :
974
Abstract :
For its outstanding piezoelectric coefficients, thin-film sol-gel Pb(Zr0.52,Ti0.48)O3 (PZT) has been widely studied over the past few decades. In particular, the impact of Zr/Ti ratio control on e31,eff coefficient has been investigated at low fields. Yet, when it comes to actuation, PZT films are used with electric fields higher than the coercive field. In this paper, the influence of Zr/Ti gradient reduction on e31,eff coefficient is investigated in actuating conditions, ie under high fields.
Keywords :
lead; microactuators; piezoelectric actuators; piezoelectric thin films; zirconium compounds; Pb(Zr0.52,Ti0.48)O3; coercive field; electric fields; microactuators; optimized gradient-free PZT thin films; piezoelectric coefficients; thin-film sol-gel; Acoustics; Actuators; Electric fields; Films; Silicon; Standards; Zirconium; PZT; Piezoelectricity; composition gradient;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium (IUS), 2012 IEEE International
Conference_Location :
Dresden
ISSN :
1948-5719
Print_ISBN :
978-1-4673-4561-3
Type :
conf
DOI :
10.1109/ULTSYM.2012.0243
Filename :
6561902
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=620667
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