Title :
Polycrystalline PZT film on porous Ti substrate synthesized by Ultrasonic Assisted Hydrothermal Method
Author :
Ohtal, Kanako ; Isobel, Gaku ; Bornmann, Peter ; Hemsel, Tobias ; Morita, Takahito
Author_Institution :
Univ. of Tokyo, Kashiwa, Japan
Abstract :
The hydrothermal method utilizes a solution-based chemical reaction to synthesize piezoelectric films. We proposed an ultrasonic irradiation during the hydrothermal synthesis, named an Ultrasonic Assisted Hydrothermal Method (UAHTM). In this study, two topics are reported, the optimum ultrasonic irradiation period for getting thicker PZT film and the PZT deposition on porous Ti substrate by UAHTM.
Keywords :
lead compounds; liquid phase deposition; piezoelectric thin films; ultrasonic applications; PZT; PZT deposition; Ti; hydrothermal synthesis; optimum ultrasonic irradiation period; piezoelectric films; polycrystalline PZT film; porous Ti substrate; solution-based chemical reaction; ultrasonic assisted hydrothermal method; Acoustics; Actuators; Films; Piezoelectric polarization; Substrates; Transducers;
Conference_Titel :
Ultrasonics Symposium (IUS), 2012 IEEE International
Conference_Location :
Dresden
Print_ISBN :
978-1-4673-4561-3
DOI :
10.1109/ULTSYM.2012.0046
