Title :
Control and monitoring of dynamic collapse event in cMUTs arrays for therapeutic applications
Author :
Gross, Dominic ; Boulme, Audren ; Perroteau, Marie ; Certon, Dominique ; Senegond, N.
Author_Institution :
Univ. Francois Rabelais de Tours, Tours, France
Abstract :
In this paper, the displacement behavior of the cMUT is analyzed thanks to a time domain model. The nonlinear components in the response spectrum with different excitation parameters are compared. A method based on the addition of a series impedance to the cMUT, which permits to decrease the harmonic components and enhance the maximum displacement swept by the diaphragm, is applied in a therapeutic context. The benefits of such a method are pointed out and discussed. After that, experimental measurements are performed to confirm these advantages, and discussed.
Keywords :
biomedical ultrasonics; capacitive sensors; micromachining; microsensors; time-domain analysis; ultrasonic transducers; cMUT arrays; diaphragm; dynamic collapse event control; dynamic collapse event monitoring; excitation parameter; series impedance; therapeutic application; time domain model; Acoustics; Harmonic analysis; Load modeling; Mathematical model; Measurement by laser beam; Resistors; Time-domain analysis;
Conference_Titel :
Ultrasonics Symposium (IUS), 2012 IEEE International
Conference_Location :
Dresden
Print_ISBN :
978-1-4673-4561-3
DOI :
10.1109/ULTSYM.2012.0459