Thin-film Lithium Niobate contour-mode resonators

This paper presents Lithium Niobate (LN) thin-film contour mode resonators (CMR) on a piezoelectric-onpiezoelectric platform. Using this platform, we demonstrate, on a black Y136 cut Lithium Niobate thin-film, one-port high-order width extensional contour mode resonators at 463MHz and 750MHz. The electro-mechanical coupling factor (k_t²) and quality factor (Q) of the 750 MHz resonator is 8.6% and 612, resulting in a k_t²*Q of 53. The 463MHz resonator exhibits a k_t²*Q of 105, with a 7% k_t² and 1500 Q. With this technology, we can potentially achieve multi-frequency band-pass filters with both wide bandwidth and steep roll-off.