Title :
Young modulus and Poisson ratio of PZT thin film by Picosecond Ultrasonics
Author :
Casset, F. ; Devos, A. ; Sadtler, S. ; Le Louarn, A. ; Emery, P. ; Le Rhun, G. ; Ancey, P. ; Fanget, S. ; Defay, E.
Author_Institution :
LETI, CEA, Grenoble, France
Abstract :
Thin-film sol-gel Pb(Zr0.52, Ti0.48)O3 (PZT) can be used in many actuator applications thanks to its high piezoelectric coefficients. The accurate knowledge of its mechanical properties such as Young´s modulus (E) and Poisson ratio (v) or stiffness matrix is a key point for predictive design, whereas the state of the art reports KPZT ranging from 70 to 139GPa. Those parameters can be accurately characterized by Picosecond Ultrasonics (PU) as detailed in this paper.
Keywords :
Poisson ratio; Young´s modulus; elasticity; lead compounds; piezoelectric thin films; ultrasonic applications; PZT; Poisson ratio; Young´s modulus; mechanical properties; picosecond ultrasonics; piezoelectric coefficients; sol-gel thin films; stiffness; Acoustics; Equations; Films; Mathematical model; Ultrasonic variables measurement; Young´s modulus; PZT; Picosecond Ultrasonics; Poisson ratio; Young modulus;
Conference_Titel :
Ultrasonics Symposium (IUS), 2012 IEEE International
Conference_Location :
Dresden
Print_ISBN :
978-1-4673-4561-3
DOI :
10.1109/ULTSYM.2012.0544
