Title :
A consistent methodology to characterize BAW resonators
Author :
Rocas, E. ; Collado, C. ; Aigner, Robert ; Mateu, J. ; Hueltes, A. ; Booth, James C.
Author_Institution :
Univ. Politec. de Catalunya (UPC), Barcelona, Spain
Abstract :
We present a methodology to characterize BAW resonators both linearly and nonlinearly. The procedure uses physical modeling along with measurements that exploit different manifestations of the nonlinear phenomena to identify the dominant linear and nonlinear material properties. Such methodology allows obtaining consistent nonlinear material parameters by use of two independents measurements.
Keywords :
acoustic resonators; bulk acoustic wave devices; nonlinear acoustics; BAW resonators; linear material properties; nonlinear material properties; nonlinear phenomena; physical modeling; Acoustics; Equations; Frequency measurement; Materials; Mathematical model; Resonant frequency; Temperature measurement; Bulk Acoustic Wave resonators; Thermodynamics; intermodulation; second harmonic; thermal effects;
Conference_Titel :
Ultrasonics Symposium (IUS), 2012 IEEE International
Conference_Location :
Dresden
Print_ISBN :
978-1-4673-4561-3
DOI :
10.1109/ULTSYM.2012.0136