DocumentCode
620965
Title
A consistent methodology to characterize BAW resonators
Author
Rocas, E. ; Collado, C. ; Aigner, Robert ; Mateu, J. ; Hueltes, A. ; Booth, James C.
Author_Institution
Univ. Politec. de Catalunya (UPC), Barcelona, Spain
fYear
2012
fDate
7-10 Oct. 2012
Firstpage
547
Lastpage
550
Abstract
We present a methodology to characterize BAW resonators both linearly and nonlinearly. The procedure uses physical modeling along with measurements that exploit different manifestations of the nonlinear phenomena to identify the dominant linear and nonlinear material properties. Such methodology allows obtaining consistent nonlinear material parameters by use of two independents measurements.
Keywords
acoustic resonators; bulk acoustic wave devices; nonlinear acoustics; BAW resonators; linear material properties; nonlinear material properties; nonlinear phenomena; physical modeling; Acoustics; Equations; Frequency measurement; Materials; Mathematical model; Resonant frequency; Temperature measurement; Bulk Acoustic Wave resonators; Thermodynamics; intermodulation; second harmonic; thermal effects;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium (IUS), 2012 IEEE International
Conference_Location
Dresden
ISSN
1948-5719
Print_ISBN
978-1-4673-4561-3
Type
conf
DOI
10.1109/ULTSYM.2012.0136
Filename
6562496
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