• DocumentCode
    620965
  • Title

    A consistent methodology to characterize BAW resonators

  • Author

    Rocas, E. ; Collado, C. ; Aigner, Robert ; Mateu, J. ; Hueltes, A. ; Booth, James C.

  • Author_Institution
    Univ. Politec. de Catalunya (UPC), Barcelona, Spain
  • fYear
    2012
  • fDate
    7-10 Oct. 2012
  • Firstpage
    547
  • Lastpage
    550
  • Abstract
    We present a methodology to characterize BAW resonators both linearly and nonlinearly. The procedure uses physical modeling along with measurements that exploit different manifestations of the nonlinear phenomena to identify the dominant linear and nonlinear material properties. Such methodology allows obtaining consistent nonlinear material parameters by use of two independents measurements.
  • Keywords
    acoustic resonators; bulk acoustic wave devices; nonlinear acoustics; BAW resonators; linear material properties; nonlinear material properties; nonlinear phenomena; physical modeling; Acoustics; Equations; Frequency measurement; Materials; Mathematical model; Resonant frequency; Temperature measurement; Bulk Acoustic Wave resonators; Thermodynamics; intermodulation; second harmonic; thermal effects;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium (IUS), 2012 IEEE International
  • Conference_Location
    Dresden
  • ISSN
    1948-5719
  • Print_ISBN
    978-1-4673-4561-3
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2012.0136
  • Filename
    6562496