Quantitative NDE of the nano-scaled thin film system using SAM

Nano-scaled thin film systems are applied widely in micro- and/or nano-electro-mechanical systems (MEMS/NEMS). When a nano-scaled thin film is deposited onto the surface of substrate, the elastic properties of the region adjacent to the substrate/film interface differ significantly from those of the respective bulk materials. Therefore, it is important to measure the mechanical properties for the nano-scaled thin film. In this study, we controlled the surface treatment processes to obtain the different adhesive conditions at the interfaces of the systems. Then, we applied acoustic spectroscopy (i.e., V(z) curve technique) to evaluate adhesive strength of the interface. Further, nano-scratch tests were applied to the systems to obtain the correlations between the SA W velocity and the adhesive strength.