Title :
Race Track Formation in a Magnetically Enhanced Hollow Cathode Electron Source
Author :
Dorf, Leonid ; Ming-Feng Wu ; Rauf, Sakandar ; Collins, Ken ; Monroy, Gonzalo ; Belostotskiy, Sergey
Author_Institution :
Appl. Mater., Inc., Santa Clara, CA, USA
Abstract :
Immersing a hollow cathode into a magnetic field enhances trapping of fast cathode electrons and ionization, providing ~30% decrease in the discharge voltage for a given current. The nonuniform magnetic field in our electron source causes an intricate visual phenomenon-formation of bright plasma cords (race tracks) near two opposite walls, in a region, where the field component parallel to the walls is the strongest.
Keywords :
cathodes; electron sources; ionisation; plasma boundary layers; plasma magnetohydrodynamics; plasma sheaths; plasma sources; bright plasma cords; discharge voltage; fast cathode electron trapping; field component; ionization; magnetically enhanced hollow cathode electron source; nonuniform magnetic field; opposite walls; race track formation; visual phenomenon-formation; Anodes; Cathodes; Electron sources; Ionization; Magnetic separation; Plasmas; Saturation magnetization; Electron beams; electron sources; plasma sheaths;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2014.2351409
