DocumentCode :
623440
Title :
Improvement of the tracking accuracy of an AFM using MPC
Author :
Rana, M.S. ; Pota, Hemanshu R. ; Petersen, Ian R. ; Habibullah
Author_Institution :
Sch. of Eng. & Inf. Technol., Univ. of New South Wales, Canberra, ACT, Australia
fYear :
2013
fDate :
19-21 June 2013
Firstpage :
1681
Lastpage :
1686
Abstract :
Tracking a reference signal is one of the major problems of an atomic force microscope (AFM). This article presents the design and experimental implementation of a model predictive control (MPC) scheme, with a vibration compensator for achieving accurate tracking for an AFM at higher scanning rates. To evaluate the improvement in performance attained by this control scheme, an experimental comparison of its tracked signals against different reference signals at different scanning rates is conducted. The experimental results demonstrate the effectiveness of the proposed controller.
Keywords :
atomic force microscopy; predictive control; AFM; MPC; atomic force microscope; model predictive control scheme; reference signal; scanning rates; tracked signals; tracking accuracy; vibration compensator; Capacitive sensors; Electrodes; Hysteresis; Noise; Resonant frequency; Vibrations;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Industrial Electronics and Applications (ICIEA), 2013 8th IEEE Conference on
Conference_Location :
Melbourne, VIC
Print_ISBN :
978-1-4673-6320-4
Type :
conf
DOI :
10.1109/ICIEA.2013.6566639
Filename :
6566639
Link To Document :
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