Title :
Improvement of the tracking accuracy of an AFM using MPC
Author :
Rana, M.S. ; Pota, Hemanshu R. ; Petersen, Ian R. ; Habibullah
Author_Institution :
Sch. of Eng. & Inf. Technol., Univ. of New South Wales, Canberra, ACT, Australia
Abstract :
Tracking a reference signal is one of the major problems of an atomic force microscope (AFM). This article presents the design and experimental implementation of a model predictive control (MPC) scheme, with a vibration compensator for achieving accurate tracking for an AFM at higher scanning rates. To evaluate the improvement in performance attained by this control scheme, an experimental comparison of its tracked signals against different reference signals at different scanning rates is conducted. The experimental results demonstrate the effectiveness of the proposed controller.
Keywords :
atomic force microscopy; predictive control; AFM; MPC; atomic force microscope; model predictive control scheme; reference signal; scanning rates; tracked signals; tracking accuracy; vibration compensator; Capacitive sensors; Electrodes; Hysteresis; Noise; Resonant frequency; Vibrations;
Conference_Titel :
Industrial Electronics and Applications (ICIEA), 2013 8th IEEE Conference on
Conference_Location :
Melbourne, VIC
Print_ISBN :
978-1-4673-6320-4
DOI :
10.1109/ICIEA.2013.6566639