DocumentCode :
62356
Title :
MEMS Laser Scanners: A Review
Author :
Holmstrom, Sven T. S. ; Baran, Utku ; Urey, Hakan
Author_Institution :
Dept. of Electr. Eng., Koc Univ., Istanbul, Turkey
Volume :
23
Issue :
2
fYear :
2014
fDate :
Apr-14
Firstpage :
259
Lastpage :
275
Abstract :
Laser scanners have been an integral part of MEMS research for more than three decades. During the last decade, miniaturized projection displays and various medical-imaging applications became the main driver for progress in MEMS laser scanners. Portable and truly miniaturized projectors became possible with the availability of red, green, and blue diode lasers during the past few years. Inherent traits of the laser scanning technology, such as the very large color gamut, scalability to higher resolutions within the same footprint, and capability of producing an always-in-focus image render it a very viable competitor in mobile projection. Here, we review the requirements on MEMS laser scanners for the demanding display applications, performance levels of the best scanners in the published literature, and the advantages and disadvantages of electrostatic, electromagnetic, piezoelectric, and mechanically coupled actuation principles. Resonant high-frequency scanners, low-frequency linear scanners, and 2-D scanners are included in this review.
Keywords :
electromagnetic actuators; electrostatic actuators; microdisplays; optical projectors; piezoelectric actuators; semiconductor lasers; 2D scanner; MEMS laser scanner; diode laser; display application; electromagnetic coupled actuation principle; electrostatic coupled actuation principle; laser scanning technology; low-frequency linear scanner; mechanically coupled actuation principle; medical imaging application; miniaturized projection display; miniaturized projector; mobile projection; piezoelectric actuation principle; portable projector; resonant high-frequency scanner; Coils; Lasers; Magnetic resonance; Micromechanical devices; Mirrors; Optimized production technology; Laser displays; MEMS scanners; portable projectors;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2013.2295470
Filename :
6714402
Link To Document :
بازگشت