Cross-axis sensitivity enhancement for a quad beam piezoresistive accelerometer

MEMS based piezoresistive accelerometers have been used in wide range of industrial applications after decades of development. For future improvement, how to continuously reduce the cross-axis sensitivity to achieve higher main-axis precision is one of the most critical issues. This letter presents a new concept of structure design to deal with cross-axis sensitivity reduction for quad beam piezoresistive accelerometers. By using existed design with combination of new structure component, the spring constant increased and the cross axis sensitivity reduced to 0.22% of the primary axis sensitivity. Instead of using traditional fabrication process, some special designed methods and procedures are proposed to perform the structure shaping and the component combination.