DocumentCode :
62503
Title :
Evaluation and Solutions for P/E Window Instability Induced by Electron Trapping in High- \\kappa Intergate Dielectrics of Flash Memory Cells
Author :
Baojun Tang ; Wei Dong Zhang ; Degraeve, Robin ; Breuil, Laurent ; Blomme, Pieter ; Jian Fu Zhang ; Zhigang Ji ; Zahid, Mohammed ; Toledano-Luque, Maria ; Van den bosch, Geert ; Van Houdt, Jan
Author_Institution :
Sch. of Eng., Liverpool John Moores Univ., Liverpool, UK
Volume :
61
Issue :
5
fYear :
2014
fDate :
May-14
Firstpage :
1299
Lastpage :
1306
Abstract :
High density of electron trapping in high-κ intergate dielectric (IGD) materials remains a major concern for planar memory cells with either poly-Si or hybrid floating gates (FGs). In this paper, for the first time, using the ultrafast I-V measurements, it is demonstrated that a significant portion of the P/E windows are actually contributed by electrons trapped initially in the high-κ IGD stacks during program/erase, and then discharged to FG or control gate during verification. More importantly, it is demonstrated, for the first time, that this fast charge transition can be suppressed using novel multilayer high-κ IGD structures, and the fast window instability can be eliminated.
Keywords :
electron traps; flash memories; high-k dielectric thin films; P/E window instability; control gate; electron trapping; fast charge transition; fast window instability; flash memory cells; high-k intergate dielectrics; hybrid floating gates; multilayer high-k IGD structures; planar memory cells; ultrafast I-V measurements; Acceleration; Aluminum oxide; Dielectrics; Electron traps; Logic gates; Time measurement; ${rm Al}_{2}{rm O}_{3}$; Al₂O₃; HfAlO; electron trap; erase; flash memory; floating gate (FG); high- $kappa$ dielectrics; high-κ dielectrics; instability; intergate dielectric (IGD); program; window;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/TED.2014.2313041
Filename :
6782720
Link To Document :
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