Novel automatic offset cancellation approach for capacitive CMOS MEMS accelerometers

Author

Po-Chang Wu ; Bin-Da Liu ; Yu-Chen Teng ; Chih-Yuan Yeh ; Sheng-Hsiang Tseng ; Hann-Huei Tsai ; Ying-Zong Juang

Author_Institution

Inst. of Electron. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan

fYear

2013

fDate

3-6 June 2013

Firstpage

147

Lastpage

148

Abstract

A monolithic inertial sensor based automatic offset calibration technique is proposed in this paper. With this technique, the output offset voltage caused by sensor and amplifier mismatches is trimmed from 600mV down to 50mV from the measurement results. For providing larger dynamic range, a programmable gain control amplifier is included in this architecture. This inertial sensor is implemented by the 0.18 μm CMOS MEMS process and the total chip area is 1.3 × 1.3 mm².

Keywords

CMOS integrated circuits; accelerometers; amplifiers; calibration; capacitive sensors; integrated circuit measurement; microsensors; monolithic integrated circuits; programmable controllers; automatic offset calibration technique; automatic offset cancellation approach; capacitive CMOS MEMS accelerometer; monolithic inertial sensor; output offset voltage; programmable gain control amplifier; size 0.18 mum; voltage 50 mV; voltage 600 mV; Accelerometers; CMOS integrated circuits; Capacitance; Capacitors; Electronics packaging; Micromechanical devices; Sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Consumer Electronics (ISCE), 2013 IEEE 17th International Symposium on

Conference_Location

Hsinchu

ISSN

0747-668X

Print_ISBN

978-1-4673-6198-9

Type

conf

DOI

10.1109/ISCE.2013.6570154

Filename

6570154