DocumentCode :
625958
Title :
LaB6 cathode workfunction evaluation
Author :
Katsap, V.
Author_Institution :
NuFlare Technol., Hopewell Jnctn, NY, USA
fYear :
2013
fDate :
21-23 May 2013
Firstpage :
1
Lastpage :
2
Abstract :
LaB6 cathode is the emitter of choice in electron beam lithography tools. In commercial LaB6 cathodes, the (100) crystalline plane is used as the emissive surface. Values of (100) and surrounding crystalline planes workfunction (WF) vary widely in literature. We have devised and implemented a simple, robust technique for evaluating LaB6 cathode workfunction.
Keywords :
cathodes; electron beam lithography; lanthanum compounds; work function; (100) crystalline plane; LaB6 cathode workfunction evaluation; LaB6; electron beam lithography tools; Abstracts; Cathodes; Layout; Linear approximation; Lithography; Materials; LaB6 cathode; e-beam lithography; workfunction;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Electronics Conference (IVEC), 2013 IEEE 14th International
Conference_Location :
Paris
Print_ISBN :
978-1-4673-5976-4
Type :
conf
DOI :
10.1109/IVEC.2013.6570897
Filename :
6570897
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=625958
بازگشت