DocumentCode
628574
Title
Thermal and mechanical design and analysis of 3D IC interposer with double-sided active chips
Author
Sheng-Tsai Wu ; Heng-Chieh Chien ; Lau, John H. ; Ming Li ; Cline, Julia ; Ji, Mingming
Author_Institution
Electron. & Optoelectron. Res. Lab., Ind. Technol. Res. Inst., Hsinchu, Taiwan
fYear
2013
fDate
28-31 May 2013
Firstpage
1471
Lastpage
1479
Abstract
In this investigation, the thermal and mechanical design and analysis of a TSV (through-silicon via) interposer which supports 2 active chips on its top-side and 1 active chip on its bottom-side (a real 3D IC integration with an interposer) are studied. Emphasis is placed on the thermal design and analysis of the chips´ average temperatures and the applied cooling capability on the heat spreader/sink. To simplify the simulations, an equivalent model, that can preciously determine the thermal performances of TSVs and solder bumps/balls, is introduced instead of a complicate detail 3D model. Another emphasis is placed on the determination of the creep strain energy density per cycle of the solder bumps/balls between the chips and the TSV interposer, the TSV interposer and the organic package substrate, and the package substrate and the PCB (printed circuit board) under environmental thermal cycling condition.
Keywords
cooling; elemental semiconductors; heat sinks; integrated circuit packaging; silicon; solders; thermal management (packaging); three-dimensional integrated circuits; 3D IC integration; 3D IC interposer; PCB; Si; TSV interposer; cooling capability; creep strain energy density; double-sided active chips; environmental thermal cycling condition; heat sink; heat spreader; mechanical design; organic package substrate; printed circuit board; solder balls; solder bumps; thermal design; through-silicon via interposer; Heat sinks; Heating; Integrated circuit modeling; Mathematical model; Thermal conductivity; Through-silicon vias;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference (ECTC), 2013 IEEE 63rd
Conference_Location
Las Vegas, NV
ISSN
0569-5503
Print_ISBN
978-1-4799-0233-0
Type
conf
DOI
10.1109/ECTC.2013.6575766
Filename
6575766
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