Title :
Theoretical analysis of piezoelectric cantilever sensor
Author :
Khan, A.B. ; Siddiqui, M.J. ; Singh, Moirangthem Marjit
Author_Institution :
Dept. of Electron. Eng., AMU, Aligarh, India
Abstract :
In this article, the sensing effect of piezoelectric cantilever sensor subjected to mechanical excitation are discussed. General analytical expression relating voltage generations to applied mechanical input excitations are derived based on the constitutive equations of these bending devices. It is observe that the clamping effect of each component in piezoelectric cantilever devices decreases the dielectric constant. The sensitivities of double layer piezoelectric cantilever sensor are higher as compare to the triple layer piezoelectric cantilever sensor.
Keywords :
cantilevers; electric sensing devices; piezoelectric devices; clamping effect; mechanical excitation; piezoelectric cantilever sensor; voltage generation; Dielectric constant; Force; Microelectronics; Piezoelectric materials; Renewable energy sources; Sensitivity; Cantilever; PZT; Piezoelectric sensor;
Conference_Titel :
Emerging Research Areas and 2013 International Conference on Microelectronics, Communications and Renewable Energy (AICERA/ICMiCR), 2013 Annual International Conference on
Conference_Location :
Kanjirapally
Print_ISBN :
978-1-4673-5150-8
DOI :
10.1109/AICERA-ICMiCR.2013.6575947