• DocumentCode
    62876
  • Title

    {\\rm Ga}_{2}{\\rm O}_{3} Nanowire Photodetector Prepared on {\\rm SiO}_{2}/{\\rm Si} Templ

  • Author

    Wu, Yijen L. ; Shoou-Jinn Chang ; Weng, W.Y. ; Liu, Chi Harold ; Tsai, Tsung Ying ; Hsu, Cheng Liang ; Chen, K.C.

  • Author_Institution
    Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
  • Volume
    13
  • Issue
    6
  • fYear
    2013
  • fDate
    Jun-13
  • Firstpage
    2368
  • Lastpage
    2373
  • Abstract
    The authors report the growth of β-Ga2O3 nanowires using a vapor phase transport method on SiO2/Si template. It is found that average diameter, average length, and density of the nanowires all increased as we increase the growth temperature. β-Ga2O3 nanowire solar-blind photodetectors with a sharp cutoff at 255 nm are also fabricated. With an incident light wavelength of 255 nm and an applied bias of 5 V, it is found that measured responsivity of the photodetector prepared at 950°C is 3.43×102O3 A/W.
  • Keywords
    gallium compounds; nanowires; photodetectors; silicon compounds; Ga2O3; average diameter; average length; growth temperature; incident light wavelength; nanowire photodetector; sharp cutoff; vapor phase transport method; voltage 5 V; wavelength 255 nm; Educational institutions; Gold; Nanoscale devices; Photodetectors; Semiconductor device measurement; Silicon; Temperature measurement; $betahbox{-}{rm Ga}_{2}{rm O}_{3}$; UV photodetectors; nanowire;
  • fLanguage
    English
  • Journal_Title
    Sensors Journal, IEEE
  • Publisher
    ieee
  • ISSN
    1530-437X
  • Type

    jour

  • DOI
    10.1109/JSEN.2013.2247996
  • Filename
    6466350