• DocumentCode
    629198
  • Title

    A novel conducting bridge resistive memory using a semiconducting dynamic E-field moderating layer

  • Author

    Lee, F.M. ; Lin, Y.Y. ; Chien, W.C. ; Lee, Deuk Y. ; Lee, Moon Ho ; Chen, W.C. ; Lung, H.L. ; Hsieh, K.Y. ; Lu, C.Y.

  • Author_Institution
    Macronix Emerging Central Lab., Macronix Int. Co., Ltd., Hsinchu, Taiwan
  • fYear
    2013
  • fDate
    11-13 June 2013
  • Abstract
    Conducting bridge resistive memory switches by forming and disrupting a thin conducting filament, but this causes high E-field in the insulator just before the filament is completed (or begins to disrupt). This paper addresses, for the first time, degradation caused by this high E-field and a novel solution is proposed. A p-type CuOx semiconductor layer is added as an E-field moderator that dynamically reduces the E-field. Without the proposed moderator the E-field becomes > 10MV/cm when the gap between the conduction filament and the top electrode becomes <; 1nm. The insulator in this gap remains conductive from the defects generated from the high E-field and this leakage reduces the resistance window. The proposed E-field moderating CuOx layer at the Cu-GST/SiO2 interface not only eliminates this issue but also serves as a Cu back-diffusion barrier, both greatly improve the device performance.
  • Keywords
    copper; copper compounds; electric fields; random-access storage; semiconductor materials; silicon compounds; Cu-SiO2; CuOx; back-diffusion barrier; conducting bridge resistive memory; defect generation; electric field moderator; semiconducting dynamic electric field moderating layer; semiconductor layer; thin conducting filament; Bridge circuits; Degradation; Electrodes; Leakage currents; Resistance; Switches; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology (VLSIT), 2013 Symposium on
  • Conference_Location
    Kyoto
  • ISSN
    0743-1562
  • Print_ISBN
    978-1-4673-5226-0
  • Type

    conf

  • Filename
    6576697