Title :
A novel conducting bridge resistive memory using a semiconducting dynamic E-field moderating layer
Author :
Lee, F.M. ; Lin, Y.Y. ; Chien, W.C. ; Lee, Deuk Y. ; Lee, Moon Ho ; Chen, W.C. ; Lung, H.L. ; Hsieh, K.Y. ; Lu, C.Y.
Author_Institution :
Macronix Emerging Central Lab., Macronix Int. Co., Ltd., Hsinchu, Taiwan
Abstract :
Conducting bridge resistive memory switches by forming and disrupting a thin conducting filament, but this causes high E-field in the insulator just before the filament is completed (or begins to disrupt). This paper addresses, for the first time, degradation caused by this high E-field and a novel solution is proposed. A p-type CuOx semiconductor layer is added as an E-field moderator that dynamically reduces the E-field. Without the proposed moderator the E-field becomes > 10MV/cm when the gap between the conduction filament and the top electrode becomes <; 1nm. The insulator in this gap remains conductive from the defects generated from the high E-field and this leakage reduces the resistance window. The proposed E-field moderating CuOx layer at the Cu-GST/SiO2 interface not only eliminates this issue but also serves as a Cu back-diffusion barrier, both greatly improve the device performance.
Keywords :
copper; copper compounds; electric fields; random-access storage; semiconductor materials; silicon compounds; Cu-SiO2; CuOx; back-diffusion barrier; conducting bridge resistive memory; defect generation; electric field moderator; semiconducting dynamic electric field moderating layer; semiconductor layer; thin conducting filament; Bridge circuits; Degradation; Electrodes; Leakage currents; Resistance; Switches; Very large scale integration;
Conference_Titel :
VLSI Technology (VLSIT), 2013 Symposium on
Conference_Location :
Kyoto
Print_ISBN :
978-1-4673-5226-0