Design and implementation of a digital analyzer for MEMS hydrogen concentration sensor

Author

Rajabzadeh, Yalda ; Mozafari, Masoud

fYear

2011

fDate

18-19 Oct. 2011

Firstpage

1

Lastpage

5

Abstract

In this paper, novel methods for designing and implementing analogue and digital hardware and software for detecting hydrogen concentration are presented. In the proposed software, by using the benefits of MEMS thermal conductivity sensors, we could calculate hydrogen - air mixture conductivity and consequently measure concentration with using relations between heating power loss and temperature difference between sensor and environment. The experimental results show that the maximum accuracy error in estimating purity is about 0.2%.

Keywords

chemical variables measurement; gas sensors; heat losses; microsensors; temperature measurement; temperature sensors; thermal conductivity measurement; MEMS hydrogen concentration sensor; MEMS thermal conductivity sensor; analogue hardware; analogue software; concentration measurement; digital analyzer; digital hardware; digital software; heating power loss; hydrogen concentration detection; hydrogen-air mixture conductivity; temperature difference; Conductivity; Heating; Hydrogen; Micromechanical devices; Temperature measurement; Temperature sensors; Thermal conductivity; Hydrogen Concentration Measurement; MEMS; RTD; Thermal Conductivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Thermal Power Plants (CTPP), 2011 Proceedings of the 3rd Conference on

Conference_Location

Tehran

Print_ISBN

978-1-4799-0591-1

Type

conf

Filename

6576962