Effect of substrate temperature deposition on the 1/f noise of Al-doped ZnO thin films

We have investigated the low-frequency noise and the sheet resistance of Al-doped ZnO thin films deposited by DC sputtering technique on glass substrate at different temperature. We characterized the noise below 100 kHz and obtained 1/f spectra. The 1/f noise normalized for bias, frequency and unit area, C_us is proportional with the sheet resistance R_sh· Sheet resistance decreases with the increasing of the substrate temperature T_s. The decrease of the normalized noise showed the improvement of the crystallinity and homogeneity of AZO thin films with T_s which indicates the sensitivity of the noise with the crystalline quality of the thin films.