Title :
New calibration solutions for multi-channel probes using an added port for thru measurements
Author :
Kooho Jung ; Andrews, Michael F.
Author_Institution :
Cascade Microtech Inc., Beaverton, OR, USA
Abstract :
A new method is proposed for calibrating multi-channel probes placed in multiple quadrants for wafer or chip level measurement. It uses an additional ground-signal-ground probe to enable thru measurements in a conventional calibration procedure, avoiding the need for custom calibration kits. The inherent delay inconsistencies in the proposed method are shown to be small enough to have minimal effects on the measurement uncertainties, in most practical cases.
Keywords :
calibration; delays; level measurement; measurement uncertainty; probes; chip level measurement; custom calibration kit; ground-signal-ground probe; inherent delay inconsistency; measurement uncertainty; multichannel probe; multiple quadrant; wafer level measurement; Calibration; Delays; Frequency measurement; Measurement uncertainty; Ports (Computers); Probes; Standards; N+1-port; SOLR; SOLT; calibration; calibration kit; calibration standard; multi-channel probe; thru;
Conference_Titel :
Microwave Measurement Conference (ARFTG), 2013 81st ARFTG
Conference_Location :
Seattle, WA
Print_ISBN :
978-1-4673-4981-9
DOI :
10.1109/ARFTG.2013.6579021
