Quintessential phase: A method of mitigating turbulence effects in interferometer measurements of precision motion

Author

Johnstone, Eric ; Abramovitch, Daniel Y.

Author_Institution

Precision Measuremen Divition, Agilent Technol., Santa Clara, CA, USA

fYear

2013

fDate

17-19 June 2013

Firstpage

3717

Lastpage

3722

Abstract

This paper describes a method of mitigating the effect of turbulence in interferometer measurements. In this paper, we will use the example of turbulence disturbing the interferometric estimate of the position of a moving stage, as a 1-D analog of wafer scanning stages used in chip making. The QP method uses a multi-segment detector to detect variations of the drift velocity of the air moving through the interferometer beam, and combines these with a turbulence model to create a set of auxiliary turbulence states. These states are then combined with the states of the moving electromechanical system to form a model of the moving stage in which the turbulence has been removed from the stage position estimate.

Keywords

atmospheric turbulence; light interferometry; motion measurement; QP method; chip making; drift velocity; interferometer beam; interferometer measurements; mitigating turbulence effects; multisegment detector; precision motion; turbulence model; wafer scanning; zauxiliary turbulence states; zelectromechanical system; Detectors; Laser beams; Noise; Optical interferometry; Optical variables measurement; Position measurement; Temperature measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

American Control Conference (ACC), 2013

Conference_Location

Washington, DC

ISSN

0743-1619

Print_ISBN

978-1-4799-0177-7

Type

conf

DOI

10.1109/ACC.2013.6580405

Filename

6580405