Title :
Model-based piecewise affine variable-gain controller synthesis
Author :
Hunnekens, B.G.B. ; Heertjes, M.F. ; van de Wouw, N. ; Nijmeijer, H.
Author_Institution :
Dept. of Mech. Eng., Eindhoven Univ. of Technol., Eindhoven, Netherlands
Abstract :
In this paper, we introduce piecewise affine variable-gain controllers as a means to improve performance compared to linear controllers. Variable-gain controllers can improve upon the tradeoff between low-frequency tracking and sensitivity to high-frequency disturbances. However, performance-based tuning of the variable-gain controllers, is far from trivial. The piecewise affine control structure introduced in this paper allows to synthesize the shape of the variable-gain controller, by means of model-based optimization of a certain performance objective. Subsequently, this allows the controller design to be tuned for the disturbance situation at hand while optimizing performance. The proposed nonlinear performance-based controller synthesis strategy is applied to a model of a wafer stage of a wafer scanner.
Keywords :
control system synthesis; optimisation; controller design; low-frequency tracking; model-based optimization; model-based piecewise affine variable-gain controller synthesis; nonlinear performance-based controller synthesis strategy; performance improvement; performance-based tuning; piecewise affine control structure; wafer scanner; Bandwidth; Integrated circuit modeling; Optimization; Semiconductor device modeling; Sensitivity; Steady-state; Tuning;
Conference_Titel :
American Control Conference (ACC), 2013
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4799-0177-7
DOI :
10.1109/ACC.2013.6580785