Title :
Learning in the synthesis of data-driven variable-gain controllers
Author :
Heertjes, Marcel ; Hunnekens, Bram ; van de Wouw, N. ; Nijmeijer, H.
Author_Institution :
Dept. of Mech. Eng., Eindhoven Univ. of Technol., Eindhoven, Netherlands
Abstract :
To deal with performance trade-offs in the control of motion systems, a method is developed for designing variable-gain feedback controllers. The idea is to select a piecewise affine controller structure and, subsequently, to find the nonlinear controller parameter values of this structure by data-driven performance optimization. Herein an ℌ2 performance objective is minimized. As a result, variable-gain controllers are synthesized using techniques from the field of learning and optimization. The method is applied to a wafer stage simulation model.
Keywords :
H2 control; control system synthesis; feedback; gain control; motion control; nonlinear control systems; optimisation; semiconductor device manufacture; semiconductor technology; variable structure systems; H2 performance objective; data-driven performance optimization; data-driven variable-gain controller synthesis; motion systems control; nonlinear controller parameter values; performance trade-offs; piecewise affine controller structure; variable-gain controllers; variable-gain feedback controllers; wafer stage simulation model; Frequency-domain analysis; Gain; Optimization; Semiconductor device modeling; Stability criteria; Switches; Lur´e systems; data-driven optimization; gradient methods; motion control; self-tuning; wafer scanners;
Conference_Titel :
American Control Conference (ACC), 2013
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4799-0177-7
DOI :
10.1109/ACC.2013.6580889
