Optical probing (EOFM / TRI): A large set of complementary applications for ultimate VLSI

Electro Optical Techniques (EOFM: Electro Optical Frequency Mapping and EOP: Electro Optical Probing) and Dynamic Light Emission Techniques (TRE: Time Resolved Emission and TRI: Time Resolved Imaging) are dynamic optical probing techniques widely used at IC level for design debug and defect localization purpose. They can pinpoint the origin of timing issue or logic fault in up to date CMOS devices. Each technique has its advantages and its drawbacks allowing a common set of applications and more specific ones. We have been involved in the development of the most advanced techniques related to EOFM and TRI on various devices (down to 28nm technology). What we can expect with each technique, which one to choose, what are the limitations are questions that must be answered regarding tooling cost and skills involved. Based on the understanding of the bases of each technique, their complementarities and their limitations have been identified. Even if these techniques can solve most of the issues we encountered, we can wonder if they can be applied on future technologies and this aspect will also be discussed.