• DocumentCode
    633910
  • Title

    Anomalous degradation behavior of p-type polycrystalline silicon thin film transistors under negative gate bias stress

  • Author

    Meng Zhang ; Wei Zhou ; Rongsheng Chen ; Man Wong ; Hoi-Sing Kwok

  • Author_Institution
    Center for Display Res., Hong Kong Univ. of Sci. & Technol., Kowloon, China
  • fYear
    2013
  • fDate
    15-19 July 2013
  • Firstpage
    724
  • Lastpage
    727
  • Abstract
    Anomalous device degradation behavior of p-type polycrystalline silicon thin film transistors under negative gate bias stress is observed. In the first stage, negative gate bias instability dominates, resulting in negative threshold voltage (Vth) shift while in the second stage, negative charge generation induced by hot electrons happens, giving rise to positive Vth shift.
  • Keywords
    elemental semiconductors; negative bias temperature instability; silicon; thin film transistors; Si; anomalous device degradation; hot electrons happen; negative charge generation; negative gate bias instability; negative gate bias stress; negative threshold voltage shift; polycrystalline thin film transistors; Decision support systems; Failure analysis; Integrated circuits;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits (IPFA), 2013 20th IEEE International Symposium on the
  • Conference_Location
    Suzhou
  • ISSN
    1946-1542
  • Print_ISBN
    978-1-4799-1241-4
  • Type

    conf

  • DOI
    10.1109/IPFA.2013.6599263
  • Filename
    6599263