Title :
A new method for eliminating cross axis sensitivity in two axis capacitive micromachined accelerometers
Author :
Tavakoli, Hamidreza ; Sani, Ebrahim Abbaspour
Author_Institution :
Microelectron. Res. Lab., Urmia Univ., Urmia, Iran
Abstract :
A novel two axis capacitive micromachined accelerometer is designed and simulated. Only a single seismic mass is employed for detecting the acceleration in both directions. Cross axis sensitivity between x axis (in-plane) and z axis (out-plane) has been eliminated. The accelerometer is designed for automotive applications with the Range of allowed acceleration in horizontal direction (x axis) of ±50g and vertical direction (z axis) of ±20g. Total structure dimension is 1.16mm×1mm×20μm.
Keywords :
accelerometers; micromechanical devices; automotive applications; capacitive micromachined accelerometers; cross axis sensitivity; seismic mass; Acceleration; Accelerometers; Capacitance; Electrodes; Sensitivity; Shape; Springs; Cross axis sensitivity; MEMS; capacitive accelerometer; fringe capacitance;
Conference_Titel :
Electrical Engineering (ICEE), 2013 21st Iranian Conference on
Conference_Location :
Mashhad
DOI :
10.1109/IranianCEE.2013.6599678
