A mathematical dynamic model for static and dynamic behaviours of MEMS-based AC voltage reference source

This paper proposes a complete dynamical model of MEMS-based AC voltage reference sources. Static and dynamic models are investigated in both ideal and non-ideal conditions. State space equations are proposed to extract the non-ideal dynamic model considering instability factors such as, offset voltage across dielectric layer and built-in voltage. These state space equations provide the opportunity to control system behaviour, enabling accurately stabilized reference voltages.