Title :
Microstructural, nanomechanical and tribological properties of ZrAlN thin films prepared by pulsed DC magnetron sputtering
Author :
Kuppusami, P. ; Singh, Ashutosh ; Mohandas, E.
Author_Institution :
Centre or Nanosci. & Nanotechnol., Sathyabama Univ., Chennai, India
Abstract :
An investigation on the structural, nano-mechanical and tribological properties of thin films of ZrAlN deposited on (100) Si and D-9 alloy substrates prepared by pulsed DC magnetron is reported. Zr1-xAlxNy films have been studied with the Al concentration range of 0<;x<;0.36 Al. It was observed that values of hardness and Young´s modulus of the alloyed ZrAlN films were in the range 9-18 GPa and 235-365 GPa, respectively. Tribological studies of ZrAlN thin film showed that the coefficient of friction of alloyed films of ZrAlN was lower for the steel ball (100Cr6 steel) than that for the Al2O3 ball up to 36 at.% of Al.
Keywords :
Young´s modulus; aluminium compounds; crystal microstructure; friction; hardness; nanostructured materials; sputter deposition; thin films; zirconium compounds; (100) Si substrates; Al concentration range; Al2O3 ball; D-9 alloy substrates; Si; Young´s modulus; Zr0.34Al0.13N0.53; Zr1-xAlxNy; Zr1-xAlxNy films; ZrAlN thin films; friction coefficient; hardness; microstructural properties; nanomechanical properties; pulsed DC magnetron sputtering; steel ball; tribological properties; Artificial intelligence; Magnetic properties; Substrates; Coefficient of Friction; Hardness; Magnetron Sputtering; Microstructure;
Conference_Titel :
Advanced Nanomaterials and Emerging Engineering Technologies (ICANMEET), 2013 International Conference on
Conference_Location :
Chennai
Print_ISBN :
978-1-4799-1377-0
DOI :
10.1109/ICANMEET.2013.6609232
