Microstructural, nanomechanical and tribological properties of ZrAlN thin films prepared by pulsed DC magnetron sputtering

Author

Kuppusami, P. ; Singh, Ashutosh ; Mohandas, E.

Author_Institution

Centre or Nanosci. & Nanotechnol., Sathyabama Univ., Chennai, India

fYear

2013

fDate

24-26 July 2013

Firstpage

55

Lastpage

57

Abstract

An investigation on the structural, nano-mechanical and tribological properties of thin films of ZrAlN deposited on (100) Si and D-9 alloy substrates prepared by pulsed DC magnetron is reported. Zr_1-xAl_xN_y films have been studied with the Al concentration range of 0<;x<;0.36 Al. It was observed that values of hardness and Young´s modulus of the alloyed ZrAlN films were in the range 9-18 GPa and 235-365 GPa, respectively. Tribological studies of ZrAlN thin film showed that the coefficient of friction of alloyed films of ZrAlN was lower for the steel ball (100Cr6 steel) than that for the Al₂O₃ ball up to 36 at.% of Al.

Keywords

Young´s modulus; aluminium compounds; crystal microstructure; friction; hardness; nanostructured materials; sputter deposition; thin films; zirconium compounds; (100) Si substrates; Al concentration range; Al₂O₃ ball; D-9 alloy substrates; Si; Young´s modulus; Zr_0.34Al_0.13N_0.53; Zr_1-xAl_xN_y; Zr_1-xAl_xN_y films; ZrAlN thin films; friction coefficient; hardness; microstructural properties; nanomechanical properties; pulsed DC magnetron sputtering; steel ball; tribological properties; Artificial intelligence; Magnetic properties; Substrates; Coefficient of Friction; Hardness; Magnetron Sputtering; Microstructure;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Nanomaterials and Emerging Engineering Technologies (ICANMEET), 2013 International Conference on

Conference_Location

Chennai

Print_ISBN

978-1-4799-1377-0

Type

conf

DOI

10.1109/ICANMEET.2013.6609232

Filename

6609232