DocumentCode :
636118
Title :
Role of titanium doping on indium oxide thin films using spray pyrolysis techniques
Author :
Manoharan, C. ; Jothibas, M. ; Dhanapandian, S. ; Kiruthigaa, G. ; Jeyakumar, S. Johnson
Author_Institution :
Dept. of Phys., Annamalai Univ., Annamalai Nagar, India
fYear :
2013
fDate :
24-26 July 2013
Firstpage :
335
Lastpage :
339
Abstract :
Indium oxide (In2O3) and titanium-doped indium oxide (ITiO) thin films were deposited onto glass substrates by the spray pyrolysis technique. The variations of the structural, optical and electrical properties with the titanium incorporation were investigated. The XRD profile of the films confirmed the cubic structure with preferred orientation along the (222) planes. The average crystalline size evaluated from the XRD profile lay in between 24.96nm and 34.47nm. The other crystallographic parameters namely, micro strain, dislocation density, and lattice constant had been estimated and reported. The average optical transmittance of the sample varied from 60% to 86% in the visible region. The optical band gap energy of the films varied from 3.68eV to 3.3eV, depending on the concentration of titanium. Topography and surface morphology of the films were performed by AFM, SEM and EDX analyses, respectively. It is observed that resistivity of the films decreases with increase of mobility for the doped film.
Keywords :
X-ray chemical analysis; atomic force microscopy; dislocation density; electrical resistivity; indium compounds; lattice constants; optical constants; pyrolysis; scanning electron microscopy; semiconductor thin films; surface morphology; surface topography; titanium; wide band gap semiconductors; AFM; EDX; In2O3:Ti; SEM; SiO2; XRD; crystalline size; crystallographic parameters; cubic structure; dislocation density; electrical properties; electrical resistivity; glass substrates; indium oxide thin films; lattice constant; microstrain density; optical band gap energy; optical properties; optical transmittance; spray pyrolysis; structural properties; surface morphology; surface topography; titanium doping; titanium-doped indium oxide thin films; Annealing; Optical films; Electrical; Indium oxide; Spray pyrolysis; Titanium; physical properties;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Nanomaterials and Emerging Engineering Technologies (ICANMEET), 2013 International Conference on
Conference_Location :
Chennai
Print_ISBN :
978-1-4799-1377-0
Type :
conf
DOI :
10.1109/ICANMEET.2013.6609310
Filename :
6609310
Link To Document :
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