DocumentCode
636141
Title
Band gap variation in copper nitride thin films
Author
Sahoo, G. ; Meher, S.R. ; Jain, Mahaveer K.
Author_Institution
Dept. of Phys., Indian Inst. of Technol. Madras, Chennai, India
fYear
2013
fDate
24-26 July 2013
Firstpage
540
Lastpage
542
Abstract
Copper nitride thin films have been prepared by pulsed direct current reactive magnetron sputtering. Structural, morphological and optical properties of the as-deposited films have been studied. X-ray diffraction analysis shows that the films are polycrystalline single phase of Cu3N. Prominent growth along (100) plane is observed for higher nitrogen flow rate whereas growth along (111) plane is observed for relatively lower nitrogen flow rate. The band gap of this material changes from 1.02 to 1.40 eV by varying the nitrogen flow rate and deposition time.
Keywords
X-ray diffraction; copper compounds; optical constants; sputter deposition; thin films; Cu3N; X-ray diffraction analysis; band gap; copper nitride thin films; morphological properties; nitrogen flow rate; optical properties; polycrystalline single phase; pulsed direct current reactive magnetron sputtering; structural properties; Nitrogen; Photonic band gap; Copper nitride; band gap; sputtering; thin film;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Nanomaterials and Emerging Engineering Technologies (ICANMEET), 2013 International Conference on
Conference_Location
Chennai
Print_ISBN
978-1-4799-1377-0
Type
conf
DOI
10.1109/ICANMEET.2013.6609357
Filename
6609357
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