• DocumentCode
    637596
  • Title

    Improved control of atomic force microscope for high-speed image scanning

  • Author

    Rana, M.S. ; Pota, Hemanshu R. ; Petersen, Ian R.

  • Author_Institution
    Sch. of Eng. & Inf. Technol., Univ. of New South Wales, Canberra, ACT, Australia
  • fYear
    2012
  • fDate
    15-16 Nov. 2012
  • Firstpage
    470
  • Lastpage
    475
  • Abstract
    In this paper the design and experimental implementation of an observer based model predictive control (OMPC) scheme for accurate tracking and fast scanning of an atomic force microscope (AFM) is presented. The design of this controller is based on an identified model of the AFM piezoelectric tube (PZT) scanner. A Kalman filter is used to obtain full-state information in the presence of position sensor noise. To evaluate the performance improvement using the proposed control scheme an experimental comparison has been made with scanned images between the proposed controller and the existing AFM PI controller. The experimental results verify the efficacy of the proposed controller.
  • Keywords
    Kalman filters; PI control; atomic force microscopy; high-speed optical techniques; image scanners; image sensors; observers; optical microscopes; predictive control; AFM PI controller; AFM piezoelectric tube scanner; Kalman filter; OMPC scheme; PZT scanner; atomic force microscope control; controller design; fast scanning; high-speed image scanning; observer based model predictive control scheme; performance improvement evaluation; position sensor noise; tracking; Frequency measurement; Microscopy; Noise; Observers; Phase measurement; Position measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Control Conference (AUCC), 2012 2nd Australian
  • Conference_Location
    Sydney, NSW
  • Print_ISBN
    978-1-922107-63-3
  • Type

    conf

  • Filename
    6613241