Title :
Detection of 2D and 3D distributions of magnetic field by moving a poly-Si micro Hall device
Author :
Kurisu, Shinpei ; Tadokoro, D. ; Matsuda, Tadamitsu ; Kimura, Mizue
Author_Institution :
Dept. of Electron. & Inf., Ryukoku Univ., Otsu, Japan
Abstract :
2D and 3D distributions of magnetic field (B) are detected by moving a poly-Si micro Hall device. First, we confirm that the Hall voltage (VH) is linearly dependent on B. Next, we move the poly-Si micro Hall device in B and measure VH. The distributions of VH are similar to those of B. Therefore, we can detect the 2D and 3D distributions of B by measuring those of VH. This predicts that we can realize a 2D area sensor by aligning poly-Si micro Hall devices in a matrix shape, and 3D spatial sensor by moving the 2D area sensor.
Keywords :
Hall effect transducers; elemental semiconductors; magnetic field measurement; microsensors; silicon; 2D area sensor; 2D magnetic field distribution detection; 3D magnetic field distribution detection; 3D spatial sensor; Hall voltage; Si; matrix shape; poly-Si microHall device; Area measurement; Films; Generators; Magnetic field measurement; Magnetic fields; Thin film transistors; Three-dimensional displays;
Conference_Titel :
Active-Matrix Flatpanel Displays and Devices (AM-FPD), 2013 Twentieth International Workshop on
Conference_Location :
Kyoto
