Abstract :
The following topics are dealt with: MEMS technology; electrostatic microactuators; MEMS in radar; bionanosensors; microtechnology research; nanotechnology research; energy management vision; system integration; material science; microoptics; nanooptics; and computational intelligence.
Keywords :
biosensors; electrostatic actuators; energy management systems; micro-optics; nanophotonics; nanosensors; MEMS in radar; MEMS technology; bionanosensors; computational intelligence; electrostatic microactuators; energy management vision; material science; microoptics; microtechnology research; nanooptics; nanotechnology research; system integration;
Conference_Titel :
Smart Structures and Systems (ICSSS), 2013 IEEE International Conference on
Conference_Location :
Chennai
Print_ISBN :
978-1-4673-6240-5
DOI :
10.1109/ICSSS.2013.6622988
