Pulse current trimming of polysilicon piezoresistors in pressure sensor

The influence of current trimming conditions on the resistance change was researched. Current trimming method may be used for the offset reduction in pressure sensor. This method may be used after chip assembling and do not requires the use of costly equipment. Samples with different dopping concentration were researched. Their behavior during pulse current trimming was variously. The practical methodology of Wheatstone bridge balancing was offer. The qualitatively description of obtained experimental results was presented.