MEMS Rotary Microgripper With Integrated Electrothermal Force Sensor

Author

Piriyanont, Busara ; Reza Moheimani, S.O.

Author_Institution

Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Newcastle, NSW, Australia

Volume

23

Issue

6

fYear

2014

fDate

Dec. 2014

Firstpage

1249

Lastpage

1251

Abstract

A microelectromechanical systems (MEMS) rotary microgripper incorporating electrothermal force sensors is reported. The device is fabricated using a standard SOI-MEMS process and achieves a stroke of (90 μm) m) at a relatively low voltage (<;80 V). The electrothermal force sensor has a small footprint, is quite linear, and operates with a high accuracy. Being fabricated from biocompatible material (silicon) with sufficiently long gripping arms, the gripper can be used to manipulate living cells, tissues, and other biologically relevant samples. A pick-and-place experiment on a soft cell is conducted to verify performance of the proposed rotary microgripper.

Keywords

bioMEMS; force sensors; grippers; microfabrication; micromanipulators; silicon-on-insulator; MEMS rotary microgripper; biocompatible material; integrated electrothermal force sensor; living cells; long gripping arms; microelectromechanical systems; pick-and-place experiment; soft cell; standard SOI-MEMS process; tissues; Force; Force sensors; Grippers; Micromechanical devices; Sensitivity; Temperature measurement; MEMS; electrothermal sensor; micro-gripper; micromanipulation; single cell; single cell.;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2014.2353034

Filename

6895240