TCAD Strain Calibration Versus Nanobeam Diffraction of Source/Drain Stressors for Ge MOSFETs

TCAD finite-element process simulations have been performed on Ge-channel n and pMOSFETs with embedded source/drain stressors or a strained Ge channel on a relaxed SiGe strain relaxed buffer (SRB), respectively, and compared with nanobeam diffraction strain measurements. While there is overall a good agreement between the simulated and experimental strain profiles, some deviations may occur, due to the presence of extended defects in the strain relaxed Ge buffer layers. This highlights the importance of selection of a strain-free reference in the relaxed Ge or SiGe SRB.