Title :
PECVD Intermediate and Absorber Layers Applied in Liquid-Phase Crystallized Silicon Solar Cells on Glass Substrates
Author :
Gabriel, Onno ; Frijnts, Tim ; Calnan, Sonya ; Ring, Sven ; Kirner, Simon ; Opitz, Andreas ; Rothert, Inga ; Rhein, Holger ; Zelt, Matthias ; Bhatti, Khalid ; Zollondz, Jens-Hendrik ; Heidelberg, Andreas ; Haschke, Jan ; Amkreutz, Daniel ; Gall, S. ; Frie
Author_Institution :
PVcomB, Helmholtz-Zentrum Berlin fur Mater. und Energie GmbH, Berlin, Germany
Abstract :
Liquid-phase crystallized silicon absorber layers have been applied in heterojunction solar cells on glass substrates with 10.8% conversion efficiency and an open-circuit voltage of 600 mV. Intermediate layers of SiOx, SiNx, and SiOxNy, as well as the a-Si:H precursor layer, were deposited on 30 cm × 30 cm glass substrates using industrial-type plasma-enhanced chemical vapor deposition equipment. After crystallization on 3cm × 5cm area using a continuous-wave infrared laser line, the resulting polysilicon material showed high material quality with large grain sizes.
Keywords :
crystallisation; elemental semiconductors; grain size; plasma CVD; semiconductor heterojunctions; silicon; silicon compounds; solar absorber-convertors; solar cells; PECVD absorber layer; PECVD intermediate layer; Si; Si:H; SiO2; SiOx-SiOxNy; continuous-wave infrared laser line; crystallization; glass substrate; grain size; heterojunction solar cell; industrial-type plasma-enhanced chemical vapor deposition; liquid-phase crystallized silicon solar cell; open-circuit voltage; polysilicon material; Chemical vapor deposition; Crystallization; Glass; Photovoltaic cells; Silicon; Substrates; Heterojunction; liquid-phase crystallization; plasma-enhanced chemical vapor deposition (PECVD); thin-film silicon;
Journal_Title :
Photovoltaics, IEEE Journal of
DOI :
10.1109/JPHOTOV.2014.2354257
