Title :
Characterization of highly doped Si with surface plasmon
Author :
Nazarov, Maxim M. ; Shkurinov, Alexander P. ; Garet, F. ; Coutaz, Jean-Louis
Author_Institution :
Inst. on Laser & Inf. Technol., Shatura, Russia
Abstract :
We propose to measure the THz surface plasmon signal transmitted after a long distance propagation over a conductive sample in view of determining the THz properties of the sample material. We demonstrate this very sensitive method on a highly-doped silicon samples. The surface permittivity differs from the Drude model prediction.
Keywords :
permittivity; silicon; surface plasmons; Drude model; Si; THz surface plasmon signal; highly doped silicon; long distance propagation; surface permittivity; Dielectrics; Frequency measurement; Plasmons; Reflection; Semiconductor device measurement; Silicon;
Conference_Titel :
Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2013 38th International Conference on
Conference_Location :
Mainz
DOI :
10.1109/IRMMW-THz.2013.6665570